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Proceedings Paper

Two-million-pixel SOI diode uncooled IRFPA with 15µm pixel pitch
Author(s): Daisuke Fujisawa; Tomohiro Maegawa; Yasuaki Ohta; Yasuhiro Kosasayama; Takahiro Ohnakado; Hisatoshi Hata; Masashi Ueno; Hiroshi Ohji; Ryota Sato; Haruyoshi Katayama; Tadashi Imai; Munetaka Ueno
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Paper Abstract

We report the development of a 2-million-pixel, that is, a 2000 x 1000 array format, SOI diode uncooled IRFPA with 15 μm pixel pitch. The combination of the shrinkable 2-in-1 SOI diode pixel technology, which we proposed last year [1], and the uncooled IRFPA stitching technology has successfully achieved a 2-million-pixel array format. The chip size is 40.30 mm x 24.75 mm. Ten-series diodes are arranged in a 15 μm pixel. In spite of the increase to 2-million-pixels, a frame rate of 30 Hz, which is the same frame rate as our former generation (25 μm pixel pitch) VGA IRFPA, can be supported by the adoption of readout circuits with four outputs. NETDs are designed to be 60 mK (f/1.0, 15 Hz) and 84 mK (f/1.0, 30 Hz), respectively and a τth is designed to be 12 msec. We performed the fabrication of the 2-million-pixel SOI diode uncooled IRFPAs with 15 μm pixel pitch, and confirmed favorable diode pixel characteristics and IRFPA operation where the evaluated NETD and τth were 65 mK (f/1.0, 15 Hz) and 12 msec, respectively.

Paper Details

Date Published: 31 May 2012
PDF: 13 pages
Proc. SPIE 8353, Infrared Technology and Applications XXXVIII, 83531G (31 May 2012); doi: 10.1117/12.919520
Show Author Affiliations
Daisuke Fujisawa, Mitsubishi Electric Corp. (Japan)
Tomohiro Maegawa, Mitsubishi Electric Corp. (Japan)
Yasuaki Ohta, Mitsubishi Electric Corp. (Japan)
Yasuhiro Kosasayama, Mitsubishi Electric Corp. (Japan)
Takahiro Ohnakado, Mitsubishi Electric Corp. (Japan)
Hisatoshi Hata, Mitsubishi Electric Corp. (Japan)
Masashi Ueno, Mitsubishi Electric Corp. (Japan)
Hiroshi Ohji, Mitsubishi Electric Corp. (Japan)
Ryota Sato, Japan Aerospace Exploration Agency (Japan)
Haruyoshi Katayama, Japan Aerospace Exploration Agency (Japan)
Tadashi Imai, Japan Aerospace Exploration Agency (Japan)
Munetaka Ueno, Japan Aerospace Exploration Agency (Japan)

Published in SPIE Proceedings Vol. 8353:
Infrared Technology and Applications XXXVIII
Bjørn F. Andresen; Gabor F. Fulop; Paul R. Norton, Editor(s)

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