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Proceedings Paper

Cathodoluminescence of conducting gratings and implications for electron-beam investigations of nano-photonic devices
Author(s): Janardan Nath; Casey Schwarz; Evan Smith; Chandana Ghosh; R. E. Peale; L. Chernyak; Walter R. Buchwald
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Paper Abstract

Cathodoluminescence (CL) spectroscopy is performed on conducting 1- and 2-dimensional gratings of metals, semimetals and semi-conductors of varying periods from 0.5 to 20 microns for a range of grating amplitudes from 0.1 to 4.6 microns. The overall emission spectrum consists of a 400 nm wide band centered at ~600 nm which depends little on the grating period, grating amplitude, material, e-beam energy, or temperature. CL intensity increases and the center wavelength blue shifts with increasing excitation beam current. For the larger amplitude 1-dimensional gratings fringes appear in the emission spectrum, which is due to interference between emission from grating bars and grooves. Surface corrugation is necessary to the emission as none is observed from smooth surfaces. The same band appears weakly in CL of a Cu sample with random ~1 micron surface roughness, but this emission is strongly reduced when the same sample is highly polished. The CL signal appears even when the ~10 nm electron-beam is at least 2 mm away from the grating edge, suggesting electron-beam induced currents are important to the emission, whose precise mechanism remains unclear. Previously suggested mechanisms--electron collision with image charge, transition radiation, surface contamination, and inverse photoemission effect--all fail to explain the observed spectrum and its lack of beam-energy dependence.

Paper Details

Date Published: 19 May 2012
PDF: 9 pages
Proc. SPIE 8376, Photonic Microdevices/Microstructures for Sensing IV, 83760J (19 May 2012); doi: 10.1117/12.918669
Show Author Affiliations
Janardan Nath, Univ. of Central Florida (United States)
Casey Schwarz, Univ. of Central Florida (United States)
Evan Smith, Univ. of Central Florida (United States)
Chandana Ghosh, Univ. of Central Florida (United States)
R. E. Peale, Univ. of Central Florida (United States)
L. Chernyak, Univ. of Central Florida (United States)
Walter R. Buchwald, Solid State Scientific Corp. (United States)

Published in SPIE Proceedings Vol. 8376:
Photonic Microdevices/Microstructures for Sensing IV
Xudong Fan; Hai Xiao; Anbo Wang, Editor(s)

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