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Proceedings Paper

Monolithic integrated-optic TDLAS sensors
Author(s): Michael B. Frish; David R. Scherer; Richard T. Wainner; Mark G. Allen; Raji Shankar; Marko Loncar
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Paper Abstract

We are developing prototype chip-scale low-power integrated-optic gas-phase chemical sensors based on infrared Tunable Diode Laser Absorption Spectroscopy (TDLAS). TDLAS is able to sense many gas phase chemicals with high sensitivity and selectivity. Using semiconductor fabrication and assembly techniques, the low-cost integrated optic TDLAS technology will permit mass production of sensors that have wide ranging industrial, medical, environmental, and consumer applications. Novel gas sensing elements using low-loss resonant photonic crystal cavities or waveguides will permit monolithic integration of a laser source, sampling elements, and detector on a semiconductor materials system substrate. Practical challenges to fabricating these devices include: a) selecting and designing the high-Q micro-resonator sensing element appropriate for the selected analyte; and b) device thermal management, especially stabilizing laser temperature with the precision needed for sensitive spectroscopic detection. In this paper, we analyze the expected sensitivity of micro-resonator-based structures for chemical sensing, and demonstrate a novel approach for exploiting laser waste heat to stabilize the laser temperature.

Paper Details

Date Published: 17 May 2012
PDF: 8 pages
Proc. SPIE 8374, Next-Generation Spectroscopic Technologies V, 83740I (17 May 2012); doi: 10.1117/12.918659
Show Author Affiliations
Michael B. Frish, Physical Sciences Inc. (United States)
David R. Scherer, Physical Sciences Inc. (United States)
Richard T. Wainner, Physical Sciences Inc. (United States)
Mark G. Allen, Physical Sciences Inc. (United States)
Raji Shankar, Harvard Univ. (United States)
Marko Loncar, Harvard Univ. (United States)

Published in SPIE Proceedings Vol. 8374:
Next-Generation Spectroscopic Technologies V
Mark A. Druy; Richard A. Crocombe, Editor(s)

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