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Proceedings Paper

Roll-to-roll manufacturing of electronic devices
Author(s): N. A. Morrison; T. Stolley; U. Hermanns; U. Kroemer; A. Reus; A. Lopp; M. Campo; H. Landgraf
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Paper Abstract

Roll-to-Roll (R2R) production of thin film based electronic devices (e.g. solar cells, activematrix TFT backplanes & touch screens) combine the advantages of the use of inexpensive, lightweight & flexible substrates with high throughput production. Significant cost reduction opportunities can also be found in terms of processing tool capital cost, utilized substrate area and process gas flow when compared with batch processing systems. Nevertheless, material handling, device patterning and yield issues have limited widespread utilization of R2R manufacturing within the electronics industry.

Paper Details

Date Published: 21 March 2012
PDF: 16 pages
Proc. SPIE 8323, Alternative Lithographic Technologies IV, 83231H (21 March 2012); doi: 10.1117/12.918639
Show Author Affiliations
N. A. Morrison, Applied Materials GmbH & Co. (Germany)
T. Stolley, Applied Materials GmbH & Co. (Germany)
U. Hermanns, Applied Materials GmbH & Co. (Germany)
U. Kroemer, Applied Materials GmbH & Co. (Germany)
A. Reus, Applied Materials GmbH & Co. (Germany)
A. Lopp, Applied Materials GmbH & Co. (Germany)
M. Campo, Applied Materials GmbH & Co. (Germany)
H. Landgraf, Applied Materials GmbH & Co. (Germany)

Published in SPIE Proceedings Vol. 8323:
Alternative Lithographic Technologies IV
William M. Tong, Editor(s)

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