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Proceedings Paper

Self-consistent field theory of directed self-assembly in laterally confined lamellae-forming diblock copolymers
Author(s): Nabil Laachi; Hassei Takahashi; Kris T. Delaney; Su-Mi Hur; David Shykind; Corey J. Weinheimer; Glenn H. Fredrickson
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Paper Abstract

We use Self-Consistent Field Theory (SCFT) to study the directed self-assembly of laterally confined diblock copolymers. In this study, we focus on systems where the self-assembled lamellae are oriented parallel to the selective sidewalls of the channel. While well-ordered, perfect lamellae are observed both experimentally and numerically, undesirable defective structures also emerge. We therefore investigate the energetics of two isolated defects, dislocations and disclinations, for various chain lengths and channel dimensions and establish conditions that favor the formation of defects. We also determine the energy barrier and the transition path between the defective and perfect state using the string method.

Paper Details

Date Published: 21 March 2012
PDF: 7 pages
Proc. SPIE 8323, Alternative Lithographic Technologies IV, 83230K (21 March 2012); doi: 10.1117/12.916577
Show Author Affiliations
Nabil Laachi, Univ. of California, Santa Barbara (United States)
Hassei Takahashi, Univ. of California, Santa Barbara (United States)
Kris T. Delaney, Univ. of California, Santa Barbara (United States)
Su-Mi Hur, Univ. of California, Santa Barbara (United States)
David Shykind, Intel Corp. (United States)
Corey J. Weinheimer, Intel Corp. (United States)
Glenn H. Fredrickson, Univ. of California, Santa Barbara (United States)

Published in SPIE Proceedings Vol. 8323:
Alternative Lithographic Technologies IV
William M. Tong, Editor(s)

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