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Proceedings Paper

Phononic crystal strips for engineering micromechanical resonators
Author(s): Jin-Chen Hsu; Feng-Chia Hsu; Pin Chang
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Paper Abstract

In micromechanical resonators, energy loss via anchors into the substrates decreases quality factors. To eliminate the anchor loss, a phononic band-gap structure is proposed and employed. In this paper, we investigate the elastic wave propagation in phononic crystal strips, cut from a silicon phononic crystal slab consisting of square-lattice vacuum holes, by analyzing the dispersion relations, acoustic eignemodes, and transmission properties. The phononic crystal strips are applied to devise the anchor-loss free micromechanical resonators and enhance resonator performances. The phononic crystal strips are found to have frequency forbidden bands and are introduced to eliminate the anchor loss in the bar-type and ring-type resonators. Numerical analysis shows that the phononic crystal strips can effectively suppress the acoustic energy leak and increase the stored energy inside the resonators. Realization of a high quality factor micromechanical resonator with minimized anchor loss is expected.

Paper Details

Date Published: 22 February 2012
PDF: 15 pages
Proc. SPIE 8269, Photonic and Phononic Properties of Engineered Nanostructures II, 826912 (22 February 2012); doi: 10.1117/12.916536
Show Author Affiliations
Jin-Chen Hsu, National Yunlin Univ. of Science and Technology (Taiwan)
Feng-Chia Hsu, Industrial Technology Research Institute South (Taiwan)
Pin Chang, Industrial Technology Research Institute South (Taiwan)


Published in SPIE Proceedings Vol. 8269:
Photonic and Phononic Properties of Engineered Nanostructures II
Ali Adibi; Shawn-Yu Lin; Axel Scherer, Editor(s)

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