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Proceedings Paper

Fabrication nanopillars pattern on PDMS using anodic aluminum oxide film as template
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Paper Abstract

Nano-pillars pattern on PDMS were fabricated by using highly ordered and density nano-pore arrays of anodic aluminum oxide film as template. We used cyclohexane to dilute polydimethylsiloxane then filled it to template, the pillars diameters range from 100 to 200 nm, pillars height about 3 to 5 μm. The morphologies of template membrane and nanopillars arrays were investigated by scanning electron microscopy and atomic force microscopy. This process offered a cheaper and easier method to develop a large area and highly ordered nanostructure mold, this mold can be used in a broad range applications such as, optoelectronic devices, semiconductor devices, bio devices, field emission displays, data storage and so on.

Paper Details

Date Published: 21 March 2012
PDF: 6 pages
Proc. SPIE 8323, Alternative Lithographic Technologies IV, 83232H (21 March 2012); doi: 10.1117/12.916456
Show Author Affiliations
Yung-Chiang Ting, Far East Univ. (Taiwan)
Shyi-Long Shy, National Nano Device Labs. (Taiwan)

Published in SPIE Proceedings Vol. 8323:
Alternative Lithographic Technologies IV
William M. Tong, Editor(s)

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