This paper addresses the framework for building critical recommended rules and a methodology for devising scoring models using simulation or silicon data. Recommended rules need to be applied to critical layout configurations (edge or polygon based geometric relations), which can cause yield issues depending on layout context and process variability. Determining of critical recommended rules is the first step for this framework. Based on process specifications and design rule calculations, recommended rules are characterized by evaluating the manufacturability response to improvements in a layout-dependent parameter. This study is applied to critical 20nm recommended rules. In order to enable the scoring of layouts, this paper also discusses a CAD framework involved in supporting use-models for improving the DFM-compliance of a physical design.

Date Published: 14 March 2012
PDF: 13 pages
Proc. SPIE 8327, Design for Manufacturability through Design-Process Integration VI, 83270U (14 March 2012); doi: 10.1117/12.916288

Published in SPIE Proceedings Vol. 8327:
Design for Manufacturability through Design-Process Integration VI
Mark E. Mason, Editor(s)