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Proceedings Paper

Subaperture phase reconstruction from a Hartmann wavefront sensor by phase retrieval method for application in EUV adaptive optics
Author(s): A. Polo; N. van Marrewijk; S. F. Pereira; H. P. Urbach
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Paper Abstract

A Hartmann Wavefront Sensor (HWS) is used as a tool to measure phase aberration at the EUV wavelength. Nevertheless, a conventional HWS measures only the wavefront slope in each sub-aperture and is not able to measure the phase structure inside it. This leads to an accuracy loss in the aberration reconstruction. In this work a phase retrieval algorithm is applied to the intensity pattern data in order to reconstruct the phase feature inside the sub-aperture and hence improve the accuracy. Experimental data confirms our simulations making this technique feasible regarding both the achieved accuracy and computational time. The phase information can be used to develop an adaptive optics system dedicated to a EUV stepper.

Paper Details

Date Published: 23 March 2012
PDF: 9 pages
Proc. SPIE 8322, Extreme Ultraviolet (EUV) Lithography III, 832219 (23 March 2012); doi: 10.1117/12.916154
Show Author Affiliations
A. Polo, Technische Univ. Delft (Netherlands)
N. van Marrewijk, Technische Univ. Delft (Netherlands)
S. F. Pereira, Technische Univ. Delft (Netherlands)
H. P. Urbach, Technische Univ. Delft (Netherlands)

Published in SPIE Proceedings Vol. 8322:
Extreme Ultraviolet (EUV) Lithography III
Patrick P. Naulleau; Obert R. Wood II, Editor(s)

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