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Proceedings Paper

In-line metrology of 3D interconnect processes
Author(s): Y. S. Ku; D. M. Shyu; P. Y. Chang; W. T. Hsu
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Paper Abstract

The continuous development of three-dimensional chip/wafer stacking technology has created the metrology requirements for in-line 3D manufacturing processes. This paper summarizes the developing metrology that has been used during via-middle & via-last TSV process development at ITRI (Industrial Technology Research Institute). An IR metrology tool including broadband infrared microscopic imaging module and a specific infrared laser confocal module is developed for the thinned wafers thickness measurement with spatial resolution of 0.5 μm. An existing spectral reflectometer is used and enhanced by implementing novel theoretical model and measurement algorithm for HDTSV inspection. It is capable of measuring via depth/bottom roughness/bottom profile in one shot measurement. A metrology module based on two sets of dual-channel capacitive sensors for metallization film thickness measurement is applied to make critical process control in the fab. We will share real metrology results and discuss possible solutions for 3D interconnect processing.

Paper Details

Date Published: 3 April 2012
PDF: 8 pages
Proc. SPIE 8324, Metrology, Inspection, and Process Control for Microlithography XXVI, 832411 (3 April 2012);
Show Author Affiliations
Y. S. Ku, Industrial Technology Research Institute (Taiwan)
National Tsing Hua Univ. (Taiwan)
D. M. Shyu, Industrial Technology Research Institute (Taiwan)
P. Y. Chang, Industrial Technology Research Institute (Taiwan)
W. T. Hsu, National Tsing Hua Univ. (Taiwan)

Published in SPIE Proceedings Vol. 8324:
Metrology, Inspection, and Process Control for Microlithography XXVI
Alexander Starikov, Editor(s)

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