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Proceedings Paper

Shared shuttles for integrated silicon optoelectronics
Author(s): Tom Baehr-Jones; Ran Ding; Ali Ayazi; Thierry Pinguet; Matt Streshinsky; Nick Harris; Jing Li; Li He; Mike Gould; Yi Zhang; Andy Eu-Jin Lim; Tsung-Yang Liow; Selin Hwee-Gee Teo; Guo-Qiang Lo; Stewart Ocheltree; Craig Hill; Andrew Pomerene; Peter De Dobbelaere; Attila Mekis; Michael Hochberg
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Paper Abstract

Shared shuttle runs are an important factor of the microelectronics business ecosystem, allowing fabless semiconductor companies to access advanced processes and supporting the development of new tools and processes. We report on the creation and progress of a shared shuttle program for access to advanced silicon photonics optoelectronic platforms that we expect will create a similar environment for the field of integrated photonics.

Paper Details

Date Published: 15 February 2012
PDF: 11 pages
Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520G (15 February 2012); doi: 10.1117/12.913096
Show Author Affiliations
Tom Baehr-Jones, Univ. of Washington (United States)
Ran Ding, Univ. of Washington (United States)
Ali Ayazi, Univ. of Washington (United States)
Thierry Pinguet, Univ. of Washington (United States)
Matt Streshinsky, Univ. of Washington (United States)
Nick Harris, Univ. of Washington (United States)
Jing Li, Univ. of Washington (United States)
Li He, Univ. of Washington (United States)
Mike Gould, Univ. of Washington (United States)
Yi Zhang, Univ. of Washington (United States)
Andy Eu-Jin Lim, A*STAR Institute of Microelectronics (Singapore)
Tsung-Yang Liow, A*STAR Institute of Microelectronics (Singapore)
Selin Hwee-Gee Teo, A*STAR Institute of Microelectronics (Singapore)
Guo-Qiang Lo, A*STAR Institute of Microelectronics (Singapore)
Stewart Ocheltree, BAE Systems (United States)
Craig Hill, BAE Systems (United States)
Andrew Pomerene, BAE Systems (United States)
Peter De Dobbelaere, Luxtera (United States)
Attila Mekis, Luxtera (United States)
Michael Hochberg, Univ. of Washington (United States)

Published in SPIE Proceedings Vol. 8252:
MOEMS and Miniaturized Systems XI
Harald Schenk; Wibool Piyawattanametha; Wilfried Noell, Editor(s)

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