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Proceedings Paper

Combination of a nano-coordinate measuring machine with a low-coherent digital holographic microscopy sensor for large-scale measurements
Author(s): S. Stuerwald; R. Schmitt
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Paper Abstract

A variety of microscopy techniques allow measuring different local physical properties of a surface under test. One of the key properties of interest in production and development of micro- and nano components is a nanometer resolution even in a measurement range of a few centimeters. By integrating a low coherent digital holographic microscope (DHM) into a coordinate measuring machine with sub nanometer resolution and nanometer uncertainty, a DHM with an outstanding measuring range is realized which enables simultaneous investigation of form and roughness of specimens with sizes up to 25 mm×25 mm×5mm along the x, y and z-axes. Different modes of scanning strategies have been analyzed and error compensated for micro and nano structured optical components with a surface diameter up to 25mm. For calculation of the correlation and thus effective coherence length, which is used for analysis of the topography of the specimen, a comprehensive theoretical approach is demonstrated and experimentally verified.

Paper Details

Date Published: 23 December 2011
PDF: 8 pages
Proc. SPIE 8204, Smart Nano-Micro Materials and Devices, 82043U (23 December 2011); doi: 10.1117/12.910788
Show Author Affiliations
S. Stuerwald, Fraunhofer-Institut für Produktionstechnologie (Germany)
R. Schmitt, Fraunhofer-Institut für Produktionstechnologie (Germany)
RWTH Aachen Univ. (Germany)

Published in SPIE Proceedings Vol. 8204:
Smart Nano-Micro Materials and Devices
Saulius Juodkazis; Min Gu, Editor(s)

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