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Proceedings Paper

Dimensional variation of polymer substrate electrode production
Author(s): Brian W. Anthony; Kasra Namvari
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Paper Abstract

Electrodes are necessary components for measuring changes in electrical properties in many microfluidic devices. The consistency of the dimensions of manufactured electrode is critical to the repeatability of measurements. We analyze the electrode dimensions to characterize a manufacturing process. Optical imaging is used to obtain high-resolution images of the electrodes and an algorithm was developed in order to estimate the critical dimensions of interdigitated electrode fingers from the images. The results show that the dimensional variation inherent in the manufacturing of the electrodes had insignificant effect on the performance of the electrodes.

Paper Details

Date Published: 14 February 2012
PDF: 6 pages
Proc. SPIE 8251, Microfluidics, BioMEMS, and Medical Microsystems X, 82510G (14 February 2012); doi: 10.1117/12.908812
Show Author Affiliations
Brian W. Anthony, Massachusetts Institute of Technology (United States)
Kasra Namvari, A. T. Kearney (United States)

Published in SPIE Proceedings Vol. 8251:
Microfluidics, BioMEMS, and Medical Microsystems X
Holger Becker; Bonnie L. Gray, Editor(s)

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