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Proceedings Paper

Compact and efficient couplers for silicon slot waveguides
Author(s): A. Säynätjoki; L. Karvonen; X. Tu; T. Y. Liow; A. Tervonen; G. Q. Lo; S. Honkanen
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Paper Abstract

Different types of slot waveguide couplers are studied theoretically and experimentally. We present strip-to-slot waveguide couplers with a length as small as 10 μm and with their feature sizes no less than 150 nm, exhibiting efficient coupling into the slot mode and negligible scattering. We demonstrate coupling loss of 0.11 dB for a 20-micron long coupler from a strip waveguide to slot waveguide, fabricated using the 248 nm deep-UV lithography. We also discuss ring resonator couplers, multimode multislot structures for 2x2 couplers, and prism coupling characterization of multislot waveguide structures.

Paper Details

Date Published: 2 February 2012
PDF: 9 pages
Proc. SPIE 8266, Silicon Photonics VII, 82660J (2 February 2012); doi: 10.1117/12.908742
Show Author Affiliations
A. Säynätjoki, Aalto Univ. (Finland)
L. Karvonen, Aalto Univ. (Finland)
X. Tu, A*STAR Institute of Microelectronics (Singapore)
T. Y. Liow, A*STAR Institute of Microelectronics (Singapore)
A. Tervonen, Aalto Univ. (Finland)
G. Q. Lo, A*STAR Institute of Microelectronics (Singapore)
S. Honkanen, Aalto Univ. (Finland)
Univ. of Eastern Finland (Finland)

Published in SPIE Proceedings Vol. 8266:
Silicon Photonics VII
Joel Kubby; Graham Trevor Reed, Editor(s)

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