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Proceedings Paper

Power enhancement of 380 nm UV-LED with hexagonal pyramid structures by AlN sacrificial layer
Author(s): Tzu-Chien Hung; Po-Min Tu; Shih-Cheng Huang; Chia-Hui Shen; Chih-Peng Hsu
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Paper Abstract

In this study, we propose to enhance an output power for 380 nm UV-LED with a hexagonal pyramid structures (HPS) on the interface of sidewall between AlGaN and AlN layers. The HPS are formed by inserting a 50 nm AlN as a sacrificial layer in n-AlGaN than using a selective wet etching process in KOH solution at 90 °C for 60 min. From the scanning electron microscope (SEM) image, the HPS can be clearly seen on the interface of AlGaN, the facet angles and the average of structure height of pyramid are 58° and 0.5-μm, respectively. According to the electroluminescent (EL) results, 12% enhancement of the light extraction efficiency can be expected in the UV-LED with HPS. Furthermore, we measured the output power at 20 mA between the UV-LED with and without HPS are 2.69 mW and 3.01 mW, respectively. As a result, the light extraction efficiency can be improved by this approach because of changing the routes of light reflection around the sidewall.

Paper Details

Date Published: 6 February 2012
PDF: 6 pages
Proc. SPIE 8278, Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XVI, 82780S (6 February 2012); doi: 10.1117/12.908330
Show Author Affiliations
Tzu-Chien Hung, Advanced Optoelectronic Technology, Inc. (Taiwan)
Po-Min Tu, Advanced Optoelectronic Technology, Inc. (Taiwan)
Shih-Cheng Huang, Advanced Optoelectronic Technology, Inc. (Taiwan)
Chia-Hui Shen, Advanced Optoelectronic Technology, Inc. (Taiwan)
Chih-Peng Hsu, Advanced Optoelectronic Technology, Inc. (Taiwan)

Published in SPIE Proceedings Vol. 8278:
Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XVI
Klaus P. Streubel; Heonsu Jeon; Li-Wei Tu; Norbert Linder, Editor(s)

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