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Proceedings Paper

3D microstructures fabricated by prism-assisted inclined UV lithography
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Paper Abstract

Three-dimensional (3D) microstructures are fabricated by prism-assisted inclined ultraviolet (UV) lithography. The exposure angles of slanted structures ranging from 0° to 65° in SU-8 photoresist can be easily achieved without immersion in index matching liquid. The sample surface reflection of UV light can be utilized for the fabrication of symmetric structures. Tripod structures have been fabricated by one-step UV exposure with corner prism. Examples of various achievable 3D microstructures are presented.

Paper Details

Date Published: 8 February 2012
PDF: 7 pages
Proc. SPIE 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, 82490L (8 February 2012); doi: 10.1117/12.908191
Show Author Affiliations
Guomin Jiang, Univ. of Miami (United States)
Sarfaraz Baig, Univ. of Miami (United States)
Michael R. Wang, Univ. of Miami (United States)

Published in SPIE Proceedings Vol. 8249:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V
Winston V. Schoenfeld; Raymond C. Rumpf; Georg von Freymann, Editor(s)

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