Share Email Print

Proceedings Paper

Surface micromachined MEMS tunable VCSEL at 1550 nm with > 70 nm single mode tuning
Author(s): Christian Gierl; Tobias Gründl; Pierluigi Debernardi; Karolina Zogal; Hooman A. Davani; Christian Grasse; Gerhard Böhm; Peter Meissner; Franko Küppers; Markus-Christian Amann
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

We present surface micro-machined tunable vertical-cavity surface-emitting lasers (VCSELs) operating around 1550nm with tuning ranges up to 100nm and side mode suppression ratios beyond 40 dB. The output power reaches 3.5mW at 1555 nm. The electro-thermal and the electro-statical actuation of a micro electro-mechanical system (MEMS) movable distributed Bragg reflector (DBR) membrane increases/decreases the cavity length which shifts the resonant wavelength of the cavity to higher/lower values. The wavelength is modulated with 200 Hz/120 kHz. Both tuning mechanisms can be used simultaneously within the same device. The newly developed surface micro-machining technology uses competitive dielectric materials for the MEMS, deposited with low temperature plasma enhanced chemical vapor deposition (PECVD), which is cost effective and capable for on wafer mass production.

Paper Details

Date Published: 7 February 2012
PDF: 9 pages
Proc. SPIE 8276, Vertical-Cavity Surface-Emitting Lasers XVI, 82760P (7 February 2012); doi: 10.1117/12.907800
Show Author Affiliations
Christian Gierl, Technische Univ. Darmstadt (Germany)
Tobias Gründl, Walter Schottky Institut (Germany)
Pierluigi Debernardi, Istituto di Elettronica e di Ingegneria dell'Informazione e delle Telecomunicazioni, CNR (Italy)
Karolina Zogal, Technische Univ. Darmstadt (Germany)
Hooman A. Davani, Technische Univ. Darmstadt (Germany)
Christian Grasse, Walter Schottky Institut (Germany)
Gerhard Böhm, Walter Schottky Institut (Germany)
Peter Meissner, Technische Univ. Darmstadt (Germany)
Franko Küppers, Technische Univ. Darmstadt (Germany)
Markus-Christian Amann, Walter Schottky Institut (Germany)

Published in SPIE Proceedings Vol. 8276:
Vertical-Cavity Surface-Emitting Lasers XVI
Chun Lei; Kent D. Choquette, Editor(s)

© SPIE. Terms of Use
Back to Top