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Proceedings Paper

Silicon nanomembranes for high-performance flexible photonic interconnects and devices
Author(s): Harish Subbaraman; Xiaochuan Xu; Nassibe Rahimi; Amir Hosseini; Ray T. Chen
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Paper Abstract

In this paper, we demonstrate the practicality of using silicon nanomembranes for use in high performance flexible photonic interconnects and devices. Using two silicon nanomembrane transfer schemes, we demonstrate successful transfer of several photonic building blocks including large aspect ratio (>4000) and long (>5cm) strip waveguides, band engineered slow light (ng > 30) photonic crystal waveguides, 1xN (1x2 and 1x6) multimode interference couplers etc, on a flexible Kapton polyimide substrate. A two-step cleaving method is also developed and implemented to facilitate testing of the transferred flexible photonic components for the first time. Upon cleaving, the propagation loss in transferred ultralong strip waveguide (~5.7cm) is found to be 1.1dB/cm, which is comparable to that of waveguides on SOI.

Paper Details

Date Published: 2 February 2012
PDF: 9 pages
Proc. SPIE 8267, Optoelectronic Interconnects XII, 82670H (2 February 2012); doi: 10.1117/12.906852
Show Author Affiliations
Harish Subbaraman, Omega Optics, Inc. (United States)
Xiaochuan Xu
Nassibe Rahimi, The Univ. of Texas at Austin (United States)
Amir Hosseini, Omega Optics, Inc. (United States)
Ray T. Chen, The Univ. of Texas at Austin (United States)

Published in SPIE Proceedings Vol. 8267:
Optoelectronic Interconnects XII
Alexei L. Glebov; Ray T. Chen, Editor(s)

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