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Proceedings Paper

Vertical comb drive microscanners for beam steering, linear scanning, and laser projection applications
Author(s): Denis Jung; Thilo Sandner; David Kallweit; Harald Schenk
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Paper Abstract

This paper describes in detail our concept of quasi-static micro scanning mirrors enabling large static deflections and linearized scanning using vertical out-of-plane comb drives. The vertical comb configuration is realized from a planar scanner substrate by wafer bonding. The device concept is highly flexible by design; different kinds of vertical combs (e.g. staggered and angular) can be realized without changing the technological process flow but by design modifications, only. First demonstrator devices are presented: a) quasi-static 1D-scanners with 4 mm mirror diameter and ±7.5° mechanical tilt angle for beam steering and b) a quasi-static / resonant 2D-scanner enabling 2D raster scanning with SVGA resolution.

Paper Details

Date Published: 15 February 2012
PDF: 10 pages
Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520U (15 February 2012); doi: 10.1117/12.906690
Show Author Affiliations
Denis Jung, Fraunhofer Institute for Photonic Microsystems (Germany)
Thilo Sandner, Fraunhofer Institute for Photonic Microsystems (Germany)
David Kallweit, Fraunhofer Institute for Photonic Microsystems (Germany)
Harald Schenk, Fraunhofer Institute for Photonic Microsystems (Germany)


Published in SPIE Proceedings Vol. 8252:
MOEMS and Miniaturized Systems XI
Harald Schenk; Wibool Piyawattanametha; Wilfried Noell, Editor(s)

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