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Proceedings Paper

A speckle-based CMOS sensor for arbitrary surface movement detection with correlated double sampling and gain error correction
Author(s): Chao Wang; Steve Tanner; Pierre-André Farine
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Paper Abstract

We present a CMOS sensor for accurate tracking of speckle movements on arbitrary surfaces. The sensor is made of a pair of comb filters with a pitch of 5.6μm and decayed by 90° to produce quadrature signals. The readout circuit is a 60 dB amplification chain with offset and KTC noise compensation. Integrated into a 180nm CMOS process, the sensor and readout circuit occupy an area of about 0.1mm2 and consume 24μW at full speed of 64 ksample/s. The direction and frequency of the quadrature signals are resolved externally by zero-crossing detection, giving an accuracy of about 5μm. Thanks to a careful layout for gain error minimization, and the use of KTC noise cancellation, a negligible residual drift was observed, and a minimal displacement of 5μm was measured.

Paper Details

Date Published: 2 February 2012
PDF: 8 pages
Proc. SPIE 8265, Optoelectronic Integrated Circuits XIV, 82650J (2 February 2012); doi: 10.1117/12.906206
Show Author Affiliations
Chao Wang, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Steve Tanner, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Pierre-André Farine, Ecole Polytechnique Fédérale de Lausanne (Switzerland)

Published in SPIE Proceedings Vol. 8265:
Optoelectronic Integrated Circuits XIV
Louay A. Eldada; El-Hang Lee, Editor(s)

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