With the aim to measure the radius of curvature deviation and the surface form deviation of optical elements online in the workshop, based on laser testing technique, two solutions of miniaturization without precision guider sphericity interferometer systems are described, and the principle of systems are analyzed. Compared with the traditional sphericity interferometer, the systems designed are particularly suitable for testing mirror noncontact online in workshop, advantaged in compact structure, no precision guider, high efficiency and low costs. The interferometer systems use the different radius of curvature of existing spherical test plates in the production workshop to produce reference wavefront. The systems can not only get the astigmatism and local deviation of lens, but also can reflect the radius of curvature deviation, which provides rapid and nondestructive noncontact online testing.

Date Published: 5 December 2011
PDF: 6 pages
Proc. SPIE 8197, 2011 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 819718 (5 December 2011); doi: 10.1117/12.906152

Published in SPIE Proceedings Vol. 8197:
2011 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments
Yongtian Wang; Yunlong Sheng; Han-Ping Shieh; Kimio Tatsuno, Editor(s)