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Proceedings Paper

Periodic nano trench structure fabricated by high-speed scanning CW laser
Author(s): Satoru Kaneko; Takeshi Ito; Manabu Yasui; Chihiro Kato; Satomi Tanaka; Takeshi Ozawa; Yasuo Hirabayashi; Akira Matsuno; Takashi Nire; Mamoru Yoshimoto
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Paper Abstract

We report periodic nanostructure on solid material irradiated by scanning continuous wave (CW) laser. Long periodic nano strip grating lines (nano-SGL) formed, not in a spot, but along the trace of the beam scan, literally parallel to each other with a at trough between the strip lines. The period of nanostructure was varied with the laser power between 500 nm and 800 nm, which equals to wavelengths used for laser scanning of green and infrared lasers. Thermal simulation and Raman spectra indicated the temperature of target exceeded the melting temperature to form the periodic nanostructure on target materials.

Paper Details

Date Published: 15 February 2012
PDF: 7 pages
Proc. SPIE 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII, 82430U (15 February 2012); doi: 10.1117/12.905970
Show Author Affiliations
Satoru Kaneko, Kanagawa Industrial Technology Ctr. (Japan)
Tokyo Institute of Technology (Japan)
Takeshi Ito, Kanagawa Industrial Technology Ctr. (Japan)
Manabu Yasui, Kanagawa Industrial Technology Ctr. (Japan)
Chihiro Kato, Kanagawa Industrial Technology Ctr. (Japan)
Satomi Tanaka, Kanagawa Industrial Technology Ctr. (Japan)
Takeshi Ozawa, Kanagawa Industrial Technology Ctr. (Japan)
Yasuo Hirabayashi, Kanagawa Industrial Technology Ctr. (Japan)
Akira Matsuno, Phoeton Corp. (Japan)
Takashi Nire, Phoeton Corp. (Japan)
Mamoru Yoshimoto, Tokyo Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 8243:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII
Guido Hennig; Xianfan Xu; Bo Gu; Yoshiki Nakata, Editor(s)

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