
Proceedings Paper
Polarized multi-color in-line digital holographic microscope for high-speed 3D surface profilingFormat | Member Price | Non-Member Price |
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Paper Abstract
A multi-color in-line digital holographic microscope (DHM) has been developed for high speed profile measurement of
micro-structures. The in-line architecture of the proposed DHM offers a high spatial resolution compared with the
conventional off-axis DHM. The multi-color DHM captures the three color hologram simultaneously in one-shot
recording by using a color CCD sensor and three RGB LED sources. The measurement range without phase ambiguity
of the multi-color DHM is extended up to 5 micrometers compared with the 0.3 micrometer of the conventional single
wavelength DHM technology. The real-time reconstruction rate of 3D profile is estimated around 20fps when using a
100 frame/sec CCD camera and a simple three-step phase shifting algorithm. The high reconstruction rate is important
for the measurement in the shop floor where fast measurement and immunity to the environment disturbance are
demanded. The air turbulence and floor vibration effects are further reduced by the near common-path architecture of
the proposed DHM. A phase stability of better than 5nm is achieved without any need of anti-vibration instrument table
and air turbulence protection cover.
Paper Details
Date Published: 15 November 2011
PDF: 6 pages
Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 832140 (15 November 2011); doi: 10.1117/12.905847
Published in SPIE Proceedings Vol. 8321:
Seventh International Symposium on Precision Engineering Measurements and Instrumentation
Kuang-Chao Fan; Man Song; Rong-Sheng Lu, Editor(s)
PDF: 6 pages
Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 832140 (15 November 2011); doi: 10.1117/12.905847
Show Author Affiliations
Jenq-Shyong Chen, National Chung Hsing Univ. (Taiwan)
Zi Sheng Lin, National Chung-Cheng Univ. (Taiwan)
Published in SPIE Proceedings Vol. 8321:
Seventh International Symposium on Precision Engineering Measurements and Instrumentation
Kuang-Chao Fan; Man Song; Rong-Sheng Lu, Editor(s)
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