A high-accuracy system to measure the thermal deformation of mechanical parts is proposed, which combines two-frequency laser interferometer, constant temperature cabinet and position finding part. The whole system include four parts. The two-frequency laser interferometer is used for measuring the displacement, and the constant temperature cabinet controls the temperature of the mechanical parts. Each part may bring in some uncertainty. To different workpieces, the ultimate principle is actually very similar although measurement methods may be a little difference. Various errors related to system are analyzed by processing the measured original displacement data using mathematics analysis and methods of error analysis. Error analysis and experimental studies are presented to approve this system which has high measurement accuracy and high accuracy of temperature control. Taking diameter measured about cylindrical work pieces for instance, the accuracy of the system is analyzed. The result of thermal deformation in steady temperature field is proved. The results also show that there is a good repeatability with deviation of 0.5μm in the system when the same diametric thermal deformation of a Φ 50mm cylindrical piece in the same temperature variation is measured for 5 times.

Date Published: 15 November 2011
PDF: 8 pages
Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83213E (15 November 2011); doi: 10.1117/12.905291

Published in SPIE Proceedings Vol. 8321:
Seventh International Symposium on Precision Engineering Measurements and Instrumentation
Kuang-Chao Fan; Man Song; Rong-Sheng Lu, Editor(s)