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Proceedings Paper

A glass tube micro-stylus probe for surface form metrology
Author(s): Bin Xu; Yuki Shimizu; Wei Gao
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Paper Abstract

This paper presents a micro-stylus probe, which is composed of a precision glass micro-ball and a shaft made by a glass tube. The diameter of the micro-ball was 50 μm. The tip angle of the glass-tube shaft was approximately 10 degrees. Strength test shows that the tolerance of glass tube micro-stylus against external forces is 90 mN. To reduce the stick-slip phenomena, a micro-tapping probe employing the glass tube micro-stylus and a PZT actuator was demonstrated. The micro-stylus probe was mounted to an air-bearing displacement sensor for scanning surface form metrology. Experimental results showed that the micro-tapping probe was effective for reducing the influence of the stick-slip phenomena.

Paper Details

Date Published: 15 November 2011
PDF: 6 pages
Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83211Z (15 November 2011); doi: 10.1117/12.904875
Show Author Affiliations
Bin Xu, Tohoku Univ. (Japan)
Yuki Shimizu, Tohoku Univ. (Japan)
Wei Gao, Tohoku Univ. (Japan)

Published in SPIE Proceedings Vol. 8321:
Seventh International Symposium on Precision Engineering Measurements and Instrumentation
Kuang-Chao Fan; Man Song; Rong-Sheng Lu, Editor(s)

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