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Proceedings Paper

A novel MEMS field emission accelerometer based on silicon nanotips array
Author(s): Li Chen; Zhi-yu Wen; Zhong-quan Wen; Hai-tao Liu
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Paper Abstract

A novel MEMS field emission accelerometer based on silicon nanotips array with about 10000 silicon tips in total is proposed. It consists of a proof mass, four L-shaped springs, silicon nanotips array, anode and feedback electrodes. The sensor is fabricated on one N-type (1 0 0) single crystal silicon wafer and one #7740 glass wafer using bulk silicon micromachining technology. The silicon tip arrays are form by wet etching with HNA (HNO3, HF and CH3COOH) with I2 as additive. After oxidation sharpening, the curvature radius of the tips is smaller than 50nm, and the tip arrays are metalized by sputtering TiW/Au film. ICP process is utilized to release the sensor chip. In order to improve the linearity of the sensor, a feedback control circuit is used to rebalance the proof mass. The accelerometer is tested on a dividing head and test results show that the sensitivity is about 420mV/g and nonlinearity is about 0.7% over a range of -1g~1g.

Paper Details

Date Published: 8 September 2011
PDF: 8 pages
Proc. SPIE 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, 819127 (8 September 2011); doi: 10.1117/12.901052
Show Author Affiliations
Li Chen, Chongqing Univ. (China)
Zhi-yu Wen, Chongqing Univ. (China)
Zhong-quan Wen, Chongqing Univ. (China)
Hai-tao Liu, Chongqing Univ. (China)


Published in SPIE Proceedings Vol. 8191:
International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies
Yuelin Wang; Huikai Xie; Yufeng Jin, Editor(s)

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