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Proceedings Paper

Investigation on the optical properties of sulfur-doped diamond thin films
Author(s): Yongjie Wang; Qingxun Zhao; Zengqian Yin; Zhanlong Zhao
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Paper Abstract

Sulfur-doped diamond thin films have been synthesized using CH4/H2/Ar/H2S gas mixture by hot filament chemical vapor deposition (HFCVD) technique. The optical properties of the films are investigated by SEM and Raman spectra. The Gaussian line shape is used in the curve fitting for the Raman spectra. Results show that the ID/IG presents the trend of first increase and then decrease with the increase of S/C ratio, however, an upward shift of the diamond peak is observed. This implies residual stress in the sulfur-doped diamond thin films. Moreover, optimum experimental conditions are proposed.

Paper Details

Date Published: 8 September 2011
PDF: 5 pages
Proc. SPIE 8193, International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Infrared Imaging and Applications, 819320 (8 September 2011); doi: 10.1117/12.900241
Show Author Affiliations
Yongjie Wang, North China Electric Power Univ. (China)
Qingxun Zhao, Hebei Univ. (China)
Zengqian Yin, North China Electric Power Univ. (China)
Zhanlong Zhao, North China Electric Power Univ. (China)


Published in SPIE Proceedings Vol. 8193:
International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Infrared Imaging and Applications
Jeffery J. Puschell; Junhao Chu; Haimei Gong; Jin Lu, Editor(s)

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