We review our previous work to develop an uncooled subMMW detector capable of achieving an NEΔT ~0.5K at 30Hz frame rate and describe our approach to develop a staring subMMW camera based on a 2D array of such detectors. Both predicted and measured results of performance metrics (responsivity, NEP, response time, spectral bandwidth, NEΔT) are presented. The measured performance agrees reasonably well with predictions and is consistent with attaining our NEΔT goal. Thus far, 1×4 detector arrays have been fabricated, and 1×8 focal plane arrays have been developed and tested. We briefly discuss our vision to achieve a128×128 detector array needed for a practical staring subMMW imager and describe the technology challenges needed to realize it.

Date Published: 13 May 2011
PDF: 6 pages
Proc. SPIE 8031, Micro- and Nanotechnology Sensors, Systems, and Applications III, 80312B (13 May 2011); doi: 10.1117/12.900199

Published in SPIE Proceedings Vol. 8031:
Micro- and Nanotechnology Sensors, Systems, and Applications III
Thomas George; M. Saif Islam; Achyut K. Dutta, Editor(s)