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Proceedings Paper

Surface study of thioacetamide and zinc sulfide passivated long wavelength infrared type-II strained layer superlattice
Author(s): Koushik Banerjee; Jun Huang; Siddhartha Ghosh; Runshen Xu; Christos G. Takoudis; Elena Plis; Sanjay Krishna; Sutharsan Ketharanathan; Matthew Chriss
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Paper Abstract

A pH adjusted acidic solution of thioacetamide (TAM) was used as a sulfidizing agent to treat long wavelength infrared (LWIR) superlattice surface for the first time. The results were compared against those for ammonium sulfide [(NH4)2S] which have been used earlier for the same purpose. X-ray photoelectron spectroscopy (XPS) results revealed that TAM treatment attains a much pronounced degree of sulfidization on superlattice surface. Electrical measurements on mesa-etched diodes exhibited maximum zero bias dynamic resistance times area (R0A) value of 590 Ω-cm2, approximately a four times improvement compared to (NH4)2S treated diodes. XPS studies revealed the reappearance of detrimental oxides on the TAM treated surface after long term air exposure asserting the need for a suitable capping layer to preserve the quality of the surface. Atomic layer deposition (ALD) was used to cap the TAM treated surface with zinc sulfide (ZnS). Precise deposition of few monolayers of ZnS on TAM treated surface was further studied using XPS to understand the evolution of bond formations at the semiconductor-dielectric interface.

Paper Details

Date Published: 10 June 2011
PDF: 8 pages
Proc. SPIE 8012, Infrared Technology and Applications XXXVII, 801243 (10 June 2011); doi: 10.1117/12.900198
Show Author Affiliations
Koushik Banerjee, Univ. of Illinois at Chicago (United States)
Jun Huang, Univ. of Illinois at Chicago (United States)
Siddhartha Ghosh, Univ. of Illinois at Chicago (United States)
Runshen Xu, Univ. of Illinois at Chicago (United States)
Christos G. Takoudis, Univ. of Illinois at Chicago (United States)
Elena Plis, The Univ. of New Mexico (United States)
Sanjay Krishna, The Univ. of New Mexico (United States)
Sutharsan Ketharanathan, EPIR Technologies, Inc. (United States)
Matthew Chriss, EPIR Technologies, Inc. (United States)

Published in SPIE Proceedings Vol. 8012:
Infrared Technology and Applications XXXVII
Bjørn F. Andresen; Gabor F. Fulop; Paul R. Norton, Editor(s)

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