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Proceedings Paper

3D features measurement using YieldStar: an angle resolved polarized scatterometer
Author(s): Anne-Laure Charley; Philippe Leray; Koen D'havé; Shaunee Cheng; Paul Hinnen; Fahong Li; Peter Vanoppen; Mircea Dusa
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Paper Abstract

Metrology on 3D features like line end gap in a SRAM structure is more challenging than on lines and spaces (L/S) structures. Scatterometry has been widely used on L/S structures and has enabled characterization of lithographic features providing with critical dimensions (CD) as well as feature height and side wall angle. In this paper, we will present the application of scatterometry to these challenging structures using an angle resolved polarized scatterometer: ASML YieldStar S-100. 3D features (line ends, brick walls,...) measurements will be presented. Measurement capability will be discussed in terms of sensitivity of the parameters of interest and correlation between them leading to a proper model choice.

Paper Details

Date Published: 30 September 2011
PDF: 7 pages
Proc. SPIE 8169, Optical Fabrication, Testing, and Metrology IV, 81690Q (30 September 2011); doi: 10.1117/12.897582
Show Author Affiliations
Anne-Laure Charley, IMEC (Belgium)
Philippe Leray, IMEC (Belgium)
Koen D'havé, IMEC (Belgium)
Shaunee Cheng, IMEC (Belgium)
Paul Hinnen, ASML Netherlands B.V. (Netherlands)
Fahong Li, ASML Netherlands B.V. (Netherlands)
Peter Vanoppen, ASML Netherlands B.V. (Netherlands)
Mircea Dusa, ASML Netherlands B.V. (Netherlands)

Published in SPIE Proceedings Vol. 8169:
Optical Fabrication, Testing, and Metrology IV
Angela Duparré; Roland Geyl, Editor(s)

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