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Proceedings Paper

Conductive conformal thin film coatings for textured PV: ALD versus sputtering
Author(s): Arrelaine Dameron; Steven Christensen; Marie Galante; Joseph Berry; Dane Gillaspie; John Perkins; David Ginley; Thomas Gennett
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Paper Abstract

Next-generation photovoltaic structures require well-established deposition routes to conformal and conducting materials with defined chemical, physical and electronic composition. This work reports on the preliminary findings associated with conformal metal oxides on structured substrates including: 1) Discovery of sputtering process conditions that can be made semi-conformal when combined with in-situ techniques such as ion-beam milling for honing surface structures; 2) Development of relevant ALD chemistries that are materials-properties competitive with sputtered materials; 3) Evaluation of chemically-functionalized surface structures that maximize surface area but are structurally tailored for efficient gas flow and to minimize line-of-sight shadowing. The initial experiments have centered on combinations of amorphous and crystalline indium oxide, zinc oxide, aluminum zinc oxide, indium tin oxide, fluorinated tin oxide and indium zinc oxide. This presentation will describe these initial experiments and elucidate key physiochemical nature of the deposited thin films.

Paper Details

Date Published: 13 September 2011
PDF: 6 pages
Proc. SPIE 8110, Thin Film Solar Technology III, 81100M (13 September 2011); doi: 10.1117/12.894272
Show Author Affiliations
Arrelaine Dameron, National Renewable Energy Lab. (United States)
Steven Christensen, National Renewable Energy Lab. (United States)
Marie Galante, National Renewable Energy Lab. (United States)
Joseph Berry, National Renewable Energy Lab. (United States)
Dane Gillaspie, National Renewable Energy Lab. (United States)
John Perkins, National Renewable Energy Lab. (United States)
David Ginley, National Renewable Energy Lab. (United States)
Thomas Gennett, National Renewable Energy Lab. (United States)

Published in SPIE Proceedings Vol. 8110:
Thin Film Solar Technology III
Louay A. Eldada, Editor(s)

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