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Proceedings Paper

Single shot phase shifting interferometry for measurement of transparent samples
Author(s): David-Ignacio Serrano-García; Noel-Ivan Toto-Arellano; Amalia Martínez-García; Gustavo Rodríguez-Zurita; Areli Montes Perez
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Paper Abstract

Due to non-destructive optical techniques allows surface measurement with high accuracy, a Common Path interferometer based on a Michelson configuration was implemented to analyze phase objects by using polarization simultaneous phase-shifting interferometry. Each beam of the interferometer has a birefringent wave plate attached in order to achieve nearly circular polarization of opposite rotations one respect to the other. The system is coupled to a 4-f arrangement with Bi-Ronchi gratings collocated in the Fourier plane. The interference of the fields associated with replicated beams, centered on each diffraction orders, is achieved varying the beams spacing with respect to the grating period. The optical configuration allows obtaining n-interferograms simultaneously. The phase reconstruction is performing by a three steps phase shifting algorithm. Experimental results are present for a phase object.

Paper Details

Date Published: 14 September 2011
PDF: 6 pages
Proc. SPIE 8133, Dimensional Optical Metrology and Inspection for Practical Applications, 81330X (14 September 2011); doi: 10.1117/12.894108
Show Author Affiliations
David-Ignacio Serrano-García, Ctr. de Investigaciones en Óptica, A.C. (Mexico)
Noel-Ivan Toto-Arellano, Ctr. de Investigaciones en Óptica, A.C. (Mexico)
Amalia Martínez-García, Ctr. de Investigaciones en Óptica, A.C. (Mexico)
Gustavo Rodríguez-Zurita, Benemérita Univ. Autónoma de Puebla (Mexico)
Areli Montes Perez, Benemérita Univ. Autónoma de Puebla (Mexico)

Published in SPIE Proceedings Vol. 8133:
Dimensional Optical Metrology and Inspection for Practical Applications
Kevin G. Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)

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