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Proceedings Paper

Fabrication of complex structures with an array of nanopinhole cameras
Author(s): Hartmut S. Leipner; Nadine Geyer; Frank Syrowatka; Huang Cheng; Bodo Fuhrmann
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Paper Abstract

A method which combines colloidal lithography with the principle of a pinhole camera is presented for the fabrication of well-ordered arrays of complex structures. By using atomic beams, it is possible to overcome the diffraction limit of light for apertures with nanometer dimensions. There are no geometrical or chromatic aberrations, since no refracting elements exist. Limitations due to the finite size of the nanopinholes, which lead to a certain blurring of the replica, are discussed.

Paper Details

Date Published: 23 September 2011
PDF: 6 pages
Proc. SPIE 8102, Nanoengineering: Fabrication, Properties, Optics, and Devices VIII, 81020W (23 September 2011); doi: 10.1117/12.893640
Show Author Affiliations
Hartmut S. Leipner, Martin-Luther-Univ. Halle-Wittenberg (Germany)
Nadine Geyer, Max-Planck-Institut für Mikrostrukturphysik (Germany)
Frank Syrowatka, Martin-Luther-Univ. Halle-Wittenberg (Germany)
Huang Cheng, Martin-Luther-Univ. Halle-Wittenberg (Germany)
Bodo Fuhrmann, Martin-Luther-Univ. Halle-Wittenberg (Germany)

Published in SPIE Proceedings Vol. 8102:
Nanoengineering: Fabrication, Properties, Optics, and Devices VIII
Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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