In this paper a novel common-path laser encoder system for nanopositioning is proposed, that can effectively reduce the environmental disturbance at its lowest level. It has promising potential for nanometer resolution and large range applications. The experimental results of the proposed laser encoder match well with ones of HP5529A for large ranges. The tested results also show that it has the capability of nanometer scale measurement resolution.

Date Published: 20 September 2011
PDF: 7 pages
Proc. SPIE 8105, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V, 81050I (20 September 2011); doi: 10.1117/12.892792

Published in SPIE Proceedings Vol. 8105:
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V
Michael T. Postek, Editor(s)