
Proceedings Paper
Combination of a micro-lens multi-spot generator with a galvanometer scanner for flexible parallel micromachining of siliconFormat | Member Price | Non-Member Price |
---|---|---|
$17.00 | $21.00 |
Paper Abstract
Multi focus optics are used for parallelizing production and for large-scale material processing. These elements split the
beam into a periodic spot pattern with a defined grid and spot size. The challenge lies in the generation of a
homogeneous envelope. Additionally the demand for flexible systems for an in-process changing of optical properties
increases. Different components for multi spot generation like diffractive optical elements or micro lens arrays have been
investigated. Diffractive optical elements offer large degree of freedom in the generation of arbitrary intensity
distributions. In the paper we demonstrate the use of a diffractive element in combination with a multi spot generator.
Within the paper we present the investigation of a micro lens array in a fly's eye condenser setup for the generation of
homogeneous spot patterns. The multi spot generator is combined with a galvanometer scanner for forming an arbitrary
shaped laser beam into a spot-, ring or arbitrary array pattern. We show the principal functionality of the multi-spot
generator. Furthermore constrains of this setup are demonstrated. The multi spot scanner is used for micro structuring of
silicon with a nanosecond diode pumped solid state laser. The ablation rate and structure quality are compared to single
spot processing.
Paper Details
Date Published: 21 September 2011
PDF: 9 pages
Proc. SPIE 8130, Laser Beam Shaping XII, 81300O (21 September 2011); doi: 10.1117/12.892679
Published in SPIE Proceedings Vol. 8130:
Laser Beam Shaping XII
Andrew Forbes; Todd E. Lizotte, Editor(s)
PDF: 9 pages
Proc. SPIE 8130, Laser Beam Shaping XII, 81300O (21 September 2011); doi: 10.1117/12.892679
Show Author Affiliations
Maik Zimmermann, Bayerisches Laserzentrum GmbH (Germany)
Friedrich-Alexander-Univ. Erlangen-Nuremberg (Germany)
Friedrich-Alexander-Univ. Erlangen-Nuremberg (Germany)
Michael Schmidt, Bayerisches Laserzentrum GmbH (Germany)
Friedrich-Alexander-Univ. Erlangen-Nuremberg (Germany)
Friedrich-Alexander-Univ. Erlangen-Nuremberg (Germany)
Published in SPIE Proceedings Vol. 8130:
Laser Beam Shaping XII
Andrew Forbes; Todd E. Lizotte, Editor(s)
© SPIE. Terms of Use
