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Proceedings Paper

Study of air-driving fluid jet polishing
Author(s): Zong-Ru Yu; Ching-Hsiang Kuo; Chun-Cheng Chen; Wei-Yao Hsu; Din Ping Tsai
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Paper Abstract

In this study, we proposed an air-driving fluid jet polishing (FJP) system which draws slurry utilizing an air/water mixer. The air-driving FJP system is mainly comprised by an air/water mixer, slurry tank with stirrer, compressed air, pressure and flow rate regulators, and a nozzle. The high speed air flow in the air/water mixer draws out the slurry from the slurry tank, and the slurry is guided to mix with air flow inside the nozzle cavity. Then, the combined fluid slurry is emitted from the nozzle. The air-driving FJP system was preliminarily tested on N-BK7 and ZERODUR® plates with different air pressure and processing time. The test results show that the air-driving system could get a Gaussian-like removal shape with 3 kg/cm2 compressed air source and the depth of removal is about 100 nm within 5 seconds processing time. The compressed air improves the kinetic energy of each abrasive, and makes it more efficient in material removal. Furthermore, the Gaussian-like removal shape is more convenient for tool path planning and surface waviness control of corrective polishing.

Paper Details

Date Published: 27 September 2011
PDF: 6 pages
Proc. SPIE 8126, Optical Manufacturing and Testing IX, 812611 (27 September 2011); doi: 10.1117/12.892140
Show Author Affiliations
Zong-Ru Yu, Instrument Technology Research Ctr. (Taiwan)
Ching-Hsiang Kuo, Instrument Technology Research Ctr. (Taiwan)
Chun-Cheng Chen, Instrument Technology Research Ctr. (Taiwan)
Wei-Yao Hsu, Instrument Technology Research Ctr. (Taiwan)
Din Ping Tsai, Instrument Technology Research Ctr. (Taiwan)
National Taiwan Univ. (Taiwan)

Published in SPIE Proceedings Vol. 8126:
Optical Manufacturing and Testing IX
James H. Burge; Oliver W. Fähnle; Ray Williamson, Editor(s)

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