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Proceedings Paper

Optical 3D testing of micro structures
Author(s): Andreas Ettemeyer
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Paper Abstract

Optical measuring techniques for micro structures are limited by the numerical aperture of the objective. Within these limits different techniques can be used: white light interferometry uses an illumination source with short coherence length to determine the absolute position of the surface while confocal profilometry uses the principle of the defocus of light. As a relatively new technique, digital holography offers the simultaneous measurement of intensity and phase of a wave to generate a 3D image with the acquisition of just one single image. We give some application examples of these techniques to micro structures including deformation measurements.

Paper Details

Date Published: 26 May 2011
PDF: 7 pages
Proc. SPIE 7997, Fourth International Seminar on Modern Cutting and Measurement Engineering, 79971S (26 May 2011); doi: 10.1117/12.891863
Show Author Affiliations
Andreas Ettemeyer, NTB Interstate Univ. of Applied Sciences of Technology (Switzerland)

Published in SPIE Proceedings Vol. 7997:
Fourth International Seminar on Modern Cutting and Measurement Engineering
Jiezhi Xin; Lianqing Zhu; Zhongyu Wang, Editor(s)

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