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Proceedings Paper

Multiwavelength single-shot interferometry without carrier fringe introduction
Author(s): Katsuichi Kitagawa
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Paper Abstract

As a single-shot interferometric technique, spatial carrier interferometry has been thoroughly investigated, and it has been shown to have some problems, such as low spatial resolution. To overcome the problems, we propose a novel single-shot surface profiling technique that does not require carrier introduction. It is based on a model-fitting algorithm and estimates the model parameters and the heights of plural points simultaneously based on their multi-wavelength intensity data. The validity of the proposed method is demonstrated by computer simulations and actual experiments.

Paper Details

Date Published: 12 July 2011
PDF: 10 pages
Proc. SPIE 8000, Tenth International Conference on Quality Control by Artificial Vision, 800009 (12 July 2011); doi: 10.1117/12.890302
Show Author Affiliations
Katsuichi Kitagawa, Toray Engineering Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 8000:
Tenth International Conference on Quality Control by Artificial Vision
Jean-Charles Pinoli; Johan Debayle; Yann Gavet; Frédéric Gruy; Claude Lambert, Editor(s)

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