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Proceedings Paper

Structured-illumination microscopy on technical surfaces: 3D metrology with nanometer sensitivity
Author(s): Markus Vogel; Zheng Yang; Alexander Kessel; Christoph Kranitzky; Christian Faber; Gerd Häusler
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Paper Abstract

Structured-illumination microscopy is an incoherent method to measure the microtopography of rough and smooth objects. The principle: A sinusoidal fringe pattern is projected into the focal plane of a microscope. While the object is scanned axially, the contrast evaluation of the observed pattern delivers the 3D topography with a height uncertainty of only a few nanometers. By means of a high aperture the system can measure steep slopes: +/- 50 degrees on smooth objects (NA=0.8) and +/- 80 degrees on rough surfaces are possible. For industrial applications a fast measurement is one of the most desired aspects. We face this demand by exploiting the physical and information-theoretical limits of the sensor, and giving rules for a trade-off between accuracy and efficiency. We further present a new method for data acquisition and evaluation which allows for a fast mechanical scanning without "stop-and-go".

Paper Details

Date Published: 26 May 2011
PDF: 6 pages
Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80820S (26 May 2011); doi: 10.1117/12.889428
Show Author Affiliations
Markus Vogel, Friedrich-Alexander-Univ. Erlangen-Nürnberg (Germany)
Zheng Yang, Friedrich-Alexander-Univ. Erlangen-Nürnberg (Germany)
Alexander Kessel, Friedrich-Alexander-Univ. Erlangen-Nürnberg (Germany)
Christoph Kranitzky, Friedrich-Alexander-Univ. Erlangen-Nürnberg (Germany)
Christian Faber, Friedrich-Alexander-Univ. Erlangen-Nürnberg (Germany)
Gerd Häusler, Friedrich-Alexander-Univ. Erlangen-Nürnberg (Germany)

Published in SPIE Proceedings Vol. 8082:
Optical Measurement Systems for Industrial Inspection VII
Peter H. Lehmann; Wolfgang Osten; Kay Gastinger, Editor(s)

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