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Proceedings Paper

MOEMS Gyroscope based on acoustooptic mode coupling
Author(s): Shu-xiang Lu; Shu-fen Chen; Yi Zhao
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Paper Abstract

A novel structure of Micro-Optic-Electro-Mechanical-System (MOEMS) gyroscope was designed. Optical waveguide diffractive component, electro-optical modulator and Surface Acoustic Wave (SAW) sensor etc. were integrated on a XY LiNbO3 substrate. The obtained sensitivity was 12 uVdeg-1s-1 in the angular rate range of 0-400deg/s.

Paper Details

Date Published: 3 January 2011
PDF: 6 pages
Proc. SPIE 7990, Optical Sensors and Biophotonics II, 79900I (3 January 2011); doi: 10.1117/12.888635
Show Author Affiliations
Shu-xiang Lu, Beijing Institute of Technology (China)
Shu-fen Chen, Beijing Institute of Technology (China)
Yi Zhao, Beijing Institute of Technology (China)

Published in SPIE Proceedings Vol. 7990:
Optical Sensors and Biophotonics II
Qingming Luo; Frank Chuang; Stefan Haacke; Chih-Chung Yang, Editor(s)

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