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Proceedings Paper

Structural and electrical properties of PLZT (8/65/35) thin films prepared by MOD method
Author(s): Jianqiang Luo; Weiguo Liu; Shun Zhou; Xiaotao Sun
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Paper Abstract

Pyroelectric lead lanthanum zirconnate titanate (PbLa8Zr65Ti35) thin films were prepared by a metal-organic decomposition (MOD) method on Pt(111)/Ti/SiO2/Si(100) substrate. After annealing at different temperatures with the same annealing time, the amorphous films were transformed into polycrystalline PLZT films. The phase formation and surface microstructure were investigated by X-ray diffraction (XRD) and atom force microscopy (AFM). The XRD data showed the formation of pervoskite phase at 650°C and indicated suppression of pyrochlore phase as temperature increasing. The PLZT pyroelectric sensor was fabricated based on sensitive barrier layer instead of the other type barrier layer. Finally, dielectric and pyroelectric coefficients was also measured.

Paper Details

Date Published: 18 February 2011
PDF: 4 pages
Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79950G (18 February 2011); doi: 10.1117/12.888385
Show Author Affiliations
Jianqiang Luo, Xi'an Technological Univ. (China)
Weiguo Liu, Xi'an Technological Univ. (China)
Shun Zhou, Xi'an Technological Univ. (China)
Xiaotao Sun, Xi'an Technological Univ. (China)

Published in SPIE Proceedings Vol. 7995:
Seventh International Conference on Thin Film Physics and Applications
Junhao Chu; Zhanshan Wang, Editor(s)

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