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Proceedings Paper

Effect of UV and vacuum treatment on stability of WO3 gas sensing films
Author(s): Guohua Gao; Guangming Wu; Zenghai Zhang; Jiandong Wu; Wei Feng; Jun Shen; Zhihua Zhang; Ai Du
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Paper Abstract

UV and vacuum treatment, as well as annealing, were tried to recover the gas sensing property of WO3 films. Results show that gas sensing films can partially recover one or two coloring and bleaching cycles if kept in vacuum condition. And UV irradiation can well recover several cycles. But heat treatment does not show any obvious effect on the gas sensing recovery. Furthermore, IR and XPS spectra were used to identify the mechanism of this improvement. Results reveal that changes of water content will reduce the desorption energy of hydrogen atom, which will accelerate the bleaching velocity.

Paper Details

Date Published: 18 February 2011
PDF: 4 pages
Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79951D (18 February 2011); doi: 10.1117/12.888224
Show Author Affiliations
Guohua Gao, Tongji Univ. (China)
Guangming Wu, Tongji Univ. (China)
Zenghai Zhang, Tongji Univ. (China)
Jiandong Wu, Tongji Univ. (China)
Wei Feng, Tongji Univ. (China)
Jun Shen, Tongji Univ. (China)
Zhihua Zhang, Tongji Univ. (China)
Ai Du, Tongji Univ. (China)

Published in SPIE Proceedings Vol. 7995:
Seventh International Conference on Thin Film Physics and Applications
Junhao Chu; Zhanshan Wang, Editor(s)

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