In this paper, we present a brief history of EUV multilayer mirrors and recent results achieved at Institut d'Optique in the fields of space science and ultra-fast pulses. Concerning space science, we present two solutions to improve reflectivity of EUV multilayer for solar imaging: three material multilayers and Al-based multilayers. Concerning attosecond pulses, we demonstrate the possibility to realize multilayer mirrors for an efficient transport of high harmonics on a broad energy band with high efficiency.

Date Published: 18 February 2011
PDF: 6 pages
Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79952Q (18 February 2011); doi: 10.1117/12.888199

Published in SPIE Proceedings Vol. 7995:
Seventh International Conference on Thin Film Physics and Applications
Junhao Chu; Zhanshan Wang, Editor(s)