
Proceedings Paper
EUV: induced ablation and surface modifications of solidsFormat | Member Price | Non-Member Price |
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Paper Abstract
In this work results of investigations concerning ablation and surface modification of polymers and some other solids
using a laser-plasma EUV source are presented. The plasma radiation was produced using a gas puff target and was
focused with a gold-plated grazing incidence ellipsoidal collector. The ablation process was investigated using a
scanning electron microscope (SEM) and a quadrupole mass spectrometer (QMS). The chemical changes were
investigated by X-ray photoelectron spectroscopy (XPS). Different kinds of micro- and nanostructures created in nearsurface
layers of the materials were obtained. Forms of the structures depend on a particular material and the EUV
exposure. In case of some polymers even a single shot was sufficient for creation of the visible changes in surface
morphology. In case of inorganic solids visible changes required usually the exposure with tens or hundreds of EUV
pulses. XPS investigations revealed chemical changes in near surface layers of polymers. Significant differences were
revealed in the XPS spectra acquired for irradiated and not-irradiated polymers. Significant decrease of functional groups
containing oxygen was indicated. Analysis of QMS spectra indicate emission of different kinds of fragments of the
polymer chains including the repeating structural units. In case of some polymers only fragments of the repeating unit
were detected.
Paper Details
Date Published: 18 May 2011
PDF: 12 pages
Proc. SPIE 8077, Damage to VUV, EUV, and X-ray Optics III, 80770H (18 May 2011); doi: 10.1117/12.887491
Published in SPIE Proceedings Vol. 8077:
Damage to VUV, EUV, and X-ray Optics III
Libor Juha; Saša Bajt; Richard A. London, Editor(s)
PDF: 12 pages
Proc. SPIE 8077, Damage to VUV, EUV, and X-ray Optics III, 80770H (18 May 2011); doi: 10.1117/12.887491
Show Author Affiliations
A. Bartnik, Military Univ. of Technology (Poland)
H. Fiedorowicz, Military Univ. of Technology (Poland)
R. Jarocki, Military Univ. of Technology (Poland)
J. Kostecki, Military Univ. of Technology (Poland)
H. Fiedorowicz, Military Univ. of Technology (Poland)
R. Jarocki, Military Univ. of Technology (Poland)
J. Kostecki, Military Univ. of Technology (Poland)
M. Szczurek, Military Univ. of Technology (Poland)
A. Szczurek, Military Univ. of Technology (Poland)
P. Wachulak, Military Univ. of Technology (Poland)
A. Szczurek, Military Univ. of Technology (Poland)
P. Wachulak, Military Univ. of Technology (Poland)
Published in SPIE Proceedings Vol. 8077:
Damage to VUV, EUV, and X-ray Optics III
Libor Juha; Saša Bajt; Richard A. London, Editor(s)
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