In this work results of investigations concerning ablation and surface modification of polymers and some other solids using a laser-plasma EUV source are presented. The plasma radiation was produced using a gas puff target and was focused with a gold-plated grazing incidence ellipsoidal collector. The ablation process was investigated using a scanning electron microscope (SEM) and a quadrupole mass spectrometer (QMS). The chemical changes were investigated by X-ray photoelectron spectroscopy (XPS). Different kinds of micro- and nanostructures created in nearsurface layers of the materials were obtained. Forms of the structures depend on a particular material and the EUV exposure. In case of some polymers even a single shot was sufficient for creation of the visible changes in surface morphology. In case of inorganic solids visible changes required usually the exposure with tens or hundreds of EUV pulses. XPS investigations revealed chemical changes in near surface layers of polymers. Significant differences were revealed in the XPS spectra acquired for irradiated and not-irradiated polymers. Significant decrease of functional groups containing oxygen was indicated. Analysis of QMS spectra indicate emission of different kinds of fragments of the polymer chains including the repeating structural units. In case of some polymers only fragments of the repeating unit were detected.

Date Published: 18 May 2011
PDF: 12 pages
Proc. SPIE 8077, Damage to VUV, EUV, and X-ray Optics III, 80770H (18 May 2011); doi: 10.1117/12.887491

Published in SPIE Proceedings Vol. 8077:
Damage to VUV, EUV, and X-ray Optics III
Libor Juha; Saša Bajt; Richard A. London, Editor(s)