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Proceedings Paper

Resonant piezoelectric AlN-actuated microcantilevers for detection of antigen/antibody interactions
Author(s): M. J. Oliver; J. Hernando-García; A. Ababneh; H. Seidel; U. Schmid; J. Olivares; E. Iborra; P. Pobedinskas; K. Haenen; J. L. Sánchez-Rojas
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Paper Abstract

Resonant microcantilevers are widely spread for different applications, such as atomic force microscopy or biosensor devices. The use of piezoelectric films on top of the cantilevers is a very promising technology due to the possibility of implementing an all electrical actuation/detection scheme. Among the different piezoelectric materials, polycrystalline aluminium nitride (AlN) is a very attractive material as, in contrast to typical alternatives such as lead zirconate titanate or zinc oxide, it is fully compatible with standard silicon technology, what facilitates its integration in silicon-based devices. In this study, our objective is to use sputter-deposited polycrystalline AlN as the actuation material for cantilever-based biosensors and to study the performance of high frequency modes for bio-detection in liquid media. Our results demonstrate a limit of mass detection of 0.07 ng for a 300x200 μm2 cantilever in liquid media, which represents a value below the mass of a monolayer of IgG on a 300x200 μm2 area.

Paper Details

Date Published: 5 May 2011
PDF: 8 pages
Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80661A (5 May 2011); doi: 10.1117/12.887010
Show Author Affiliations
M. J. Oliver, Univ. de Castilla-La Mancha (Spain)
J. Hernando-García, Univ. de Castilla-La Mancha (Spain)
A. Ababneh, Yarmouk Univ. (Jordan)
H. Seidel, Saarland Univ. (Germany)
U. Schmid, Technische Univ. Wien (Austria)
J. Olivares, Univ. Politécnica de Madrid (Spain)
E. Iborra, Univ. Politécnica de Madrid (Spain)
P. Pobedinskas, Univ. Hasselt (Belgium)
K. Haenen, Univ. Hasselt (Belgium)
J. L. Sánchez-Rojas, Univ. de Castilla-La Mancha (Spain)

Published in SPIE Proceedings Vol. 8066:
Smart Sensors, Actuators, and MEMS V
Ulrich Schmid; José Luis Sánchez-Rojas; Monika Leester-Schaedel, Editor(s)

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