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Proceedings Paper

A comb-drive scanning-head array for fast scanning-probe microscope measurements
Author(s): S. Gao; H. Wolff; K. Herrmann; U. Brand; K. Hiller; S. Hahn; A. Sorger; J. Mehner
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Paper Abstract

A novel MEMS based scanning head comprising an array of comb drive actuators is developed for parallel SPM (Scanning Probe Microscope) imaging to enhance the performance of the currently available nano-measuring machines and effectively reduce the measurement time for large specimen. The scanning-head consists of an row of seven scan heads, which are realized on one chip by MEMS technology. The actuation of the scan-head is realized by an electrostatic comb-drive, in which the displacement can be measured by detecting the capacitance change of the actuator. The main shaft of the scan-head protrudes out of the MEMS chip to sense the surface topography of a specimen under test. To further improve the lateral resolution of the micro-SPM head, an AFM tip can be mounted onto the end of the actuator's main shaft. Design, simulation and fabrication of the scan-head array will be presented. The displacement of the actuator was calibrated using a laser interferometer. The actuator has a good linearity. Mechanical performance such as stiffness and eigenfrequency were also investigated. Preliminary experiments proved the feasibility of the scanninghead array for large-scale topography measurements.

Paper Details

Date Published: 5 May 2011
PDF: 8 pages
Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 806626 (5 May 2011); doi: 10.1117/12.886938
Show Author Affiliations
S. Gao, Physikalisch-Technische Bundesanstalt (Germany)
H. Wolff, Physikalisch-Technische Bundesanstalt (Germany)
K. Herrmann, Physikalisch-Technische Bundesanstalt (Germany)
U. Brand, Physikalisch-Technische Bundesanstalt (Germany)
K. Hiller, Chemnitz Univ. of Technology (Germany)
S. Hahn, Chemnitz Univ. of Technology (Germany)
A. Sorger, Chemnitz Univ. of Technology (Germany)
J. Mehner, Chemnitz Univ. of Technology (Germany)

Published in SPIE Proceedings Vol. 8066:
Smart Sensors, Actuators, and MEMS V
Ulrich Schmid; José Luis Sánchez-Rojas; Monika Leester-Schaedel, Editor(s)

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