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Proceedings Paper

3D capacitive vibrational micro harvester using isotropic charging of electrets deposited on vertical sidewalls
Author(s): Antwi Nimo; Ulrich Mescheder; Bernhard Müller; Awad Saad Abou Elkeir
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Paper Abstract

In this paper the design and fabrication of an integrated micro energy harvester capable of harvesting electrical energy from low amplitude mechanical vibrations is presented. A specific feature of the presented energy harvester is its capability to harvest vibrational energy from different directions (3D). This is done through an innovative approach for electrets placed on vertical sidewalls and thereby allowing for miniaturization of 3D capacitive energy harvester on monolithic CMOS substrates. A new simple electret charging method using ionic hair-dryers/hair ionizers is reported and shown that it can be effectively used for electrets-based micro energy harvesters.

Paper Details

Date Published: 5 May 2011
PDF: 14 pages
Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80661Q (5 May 2011); doi: 10.1117/12.886876
Show Author Affiliations
Antwi Nimo, Hochschule Furtwangen Univ. (Germany)
Ulrich Mescheder, Hochschule Furtwangen Univ. (Germany)
Bernhard Müller, Hochschule Furtwangen Univ. (Germany)
Awad Saad Abou Elkeir, Hochschule Furtwangen Univ. (Germany)

Published in SPIE Proceedings Vol. 8066:
Smart Sensors, Actuators, and MEMS V
Ulrich Schmid; José Luis Sánchez-Rojas; Monika Leester-Schaedel, Editor(s)

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