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Proceedings Paper

Hardware implementation of an electrostatic MEMS-actuator linearization
Author(s): F. Mair; M. Egretzberger; A. Kugi
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Paper Abstract

In this paper, an electrostatic actuator linearization will be introduced, which is based on an existing hardware-efficient iterative square root algorithm. The algorithm is solely based on add and shift operations while just needing n/2 iterations for an n bit wide input signal. As a practical example, the nonlinear input transformation will be utilized for the design of the primary mode controller of a capacitive MEMS gyroscope and an implementation of the algorithm in the Verilog hardware description language will be instantiated. Finally, measurement results will validate the feasibility of the presented control concept and its hardware implementation.

Paper Details

Date Published: 5 May 2011
PDF: 8 pages
Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 806610 (5 May 2011); doi: 10.1117/12.886793
Show Author Affiliations
F. Mair, Vienna Univ. of Technology (Austria)
M. Egretzberger, Vienna Univ. of Technology (Austria)
A. Kugi, Vienna Univ. of Technology (Austria)

Published in SPIE Proceedings Vol. 8066:
Smart Sensors, Actuators, and MEMS V
Ulrich Schmid; José Luis Sánchez-Rojas; Monika Leester-Schaedel, Editor(s)

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