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Proceedings Paper

Miniaturized piezoelectric structures for application temperatures up to 1000 °C
Author(s): S. Schmidtchen; J. Sauerwald; D. Richter; H. Fritze
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Paper Abstract

Miniaturized piezoelectric structures based on the material langasite are fabricated and characterized. Single crystalline langasite is a high-temperature stable material and can be excited using the piezoelectric effect up to temperatures above 1000 °C. The scope of our research is to design and realize small piezoelectric structures to serve as resonant sensors or active electronic components at high temperatures. Wet chemical etch processes are developed which enable isotropic and anisotropic etching with rates up to 90 μm/h. Small structures such as membranes as well as cantilevers are prepared. Electrical and optical characterization provides information about the electromechanical properties of those structures. Resonance properties are determined with electrical impedance measurements in-situ at temperatures close to 1000 °C. The temperature dependent frequency shift and the resonator quality factor are determined for membranes, cantilevers and tuning forks. In addition, investigations with a laser interferometer are obtained. Thereby, the spatial distribution of the vibration displacement is observed for several piezoelectric devices.

Paper Details

Date Published: 5 May 2011
PDF: 10 pages
Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 806605 (5 May 2011); doi: 10.1117/12.886740
Show Author Affiliations
S. Schmidtchen, Clausthal Univ. of Technology (Germany)
J. Sauerwald, Clausthal Univ. of Technology (Germany)
D. Richter, Clausthal Univ. of Technology (Germany)
H. Fritze, Clausthal Univ. of Technology (Germany)

Published in SPIE Proceedings Vol. 8066:
Smart Sensors, Actuators, and MEMS V
Ulrich Schmid; José Luis Sánchez-Rojas; Monika Leester-Schaedel, Editor(s)

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