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Proceedings Paper

Microfabricated ultrashort cantilever probes for high speed AFM
Author(s): C. Richter; P. Weinzierl; O. Krause; W. Engl; C. Penzkofer; B. Irmer; T. Sulzbach
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Paper Abstract

Atomic force microscopy (AFM) enables resolving features in the nanometer regime and allows in contrast to scanning tunneling microscopy (STM) measuring in liquids and a true atomic resolution also on isolating samples. But as all other scanning probe techniques the AFM requires serial data acquisition and suffers therefore from a low temporal resolution. Fast dynamical processes like most chemical reaction can not be observed in real time and the application as a tool for quality controls, e.g. in semicunductor indutries, fails often due to an unprofitable high time consumption. To enhance the scanning speed of an AFM we have developed, realized and tested different novel AFM-probes - one key component for high speed AFM- with small cantilevers and integrated sharp tips. Although such cantilevers have been presented and demonstrated on specific applications by different groups, our focus concentrates on widely dispersed applications and on aspects of mass fabrication like reproducibility and yield.

Paper Details

Date Published: 5 May 2011
PDF: 9 pages
Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80661S (5 May 2011);
Show Author Affiliations
C. Richter, Nanoworld Services GmbH (Germany)
P. Weinzierl, Nanoworld Services GmbH (Germany)
O. Krause, Nanoworld Services GmbH (Germany)
W. Engl, Nanoworld Services GmbH (Germany)
C. Penzkofer, nanotools GmbH (Germany)
B. Irmer, nanotools GmbH (Germany)
T. Sulzbach, Nanoworld Services GmbH (Germany)

Published in SPIE Proceedings Vol. 8066:
Smart Sensors, Actuators, and MEMS V
Ulrich Schmid; José Luis Sánchez-Rojas; Monika Leester-Schaedel, Editor(s)

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